Mathematical modeling and application of removal functions during deterministic ion beam figuring of optical surfaces. Part 2: application

摘要

Ion beam figuring (IBF) is established for the final precision figuring of optical components. In this deterministic method, the figuring process is represented by a two-dimensional (2D) convolution operation of a constant removal function and the dwell time, where the figuring precision is guaranteed by the stability of the removal function as well as the solution accuracy of the dwell time. However, the current 2D convolution equation cannot factually reflect the IBF process of curved surfaces, which neglects the influence of the projection distortion and the workpiece geometry. Consequently, the current convolution algorithm for the IBF process would influence the solution accuracy for the dwell time and reduce the convergence of the figuring process. In this part, we propose an improved algorithm based on the mathematical modeling of the dynamic removal function in Part A, which provides a more accurate dwell time for IBF of a curved surface. Additionally, simulation analysis and figuring experiments are carried out to verify the feasibility of our proposed algorithm. The final experimental results indicate that the figuring precision and efficiency can be simultaneously improved by this method.