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Fabrication of three-dimensional photonic crystals with two-beam holographic lithography

机译:两束全息光刻技术制作三维光子晶体

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摘要

A holographic technique used to fabricate three-dimensional photonic crystals with a two-beam interference method is presented. In the optical setup of fabrication one beam is incident on the recording plate in the direction of the plate normal and the other beam with an angle to the normal. Three exposures were taken. Between each exposure, the recording plate was rotated 120 deg on axis until three exposures were completed. Good three-dimensional lattice structures have been obtained. Theoretical analysis, computer simulations, and experimental results are presented.
机译:提出了一种利用两束干涉法制造三维光子晶体的全息技术。在制造的光学装置中,一束光束沿板法线方向入射在记录板上,另一束光束与法线成一定角度。进行了三次曝光。在每次曝光之间,将记录板在轴上旋转120度,直到完成三个曝光为止。已经获得了良好的三维晶格结构。介绍了理论分析,计算机仿真和实验结果。

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