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首页> 外文期刊>Applied optics >Percussion hole drilling of metals with a fourth-harmonic Nd:YAG laser studied by defocused laser speckle correlation
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Percussion hole drilling of metals with a fourth-harmonic Nd:YAG laser studied by defocused laser speckle correlation

机译:用散焦激光散斑相关性研究四谐波Nd:YAG激光对金属的钻孔

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Defocused speckle correlation is introduced as a tool for measuring the response in metal sheets during percussion laser drilling. For this procedure the fourth-harmonic Nd:YAG wavelength (266 nm) was used in pulsed mode. The method provides a cost-efficient and robust alternative to speckle interferometry for the study of the small deformations that appear during laser processing. The accuracy was shown to be of the order of a few tens of microradians for the tilt component that is measured, which translates to a few nanometers in deflection when the component is spatially integrated. In the measurements, deflections in the form of craters as large as 50 nm were detected on the back sides of silver and copper sheets. The diameters of the craters were 300 μm in the silver and 150 μm in the copper sheet; the output diameter of the hole was ~5 μm.
机译:散焦散斑相关性被引入作为一种工具,用于在冲击激光钻孔过程中测量金属薄板中的响应。对于此程序,以脉冲模式使用第四谐波Nd:YAG波长(266 nm)。该方法为散斑干涉测量法的研究提供了一种经济高效的解决方案,可用于研究激光加工过程中出现的小变形。对于所测量的倾斜分量,其精度显示为几十微弧度的数量级,当该分量在空间上集成时,其偏转量可转换为几纳米。在测量中,在银和铜片的背面检测到了直径最大为50 nm的凹坑形式的变形。凹坑的直径在银中为300μm,在铜板上为150μm。孔的输出直径为〜5μm。

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