The superresolution technique is well known for its ability to compress the central diffractive spot that is smaller than the Airy diffractive spot. In this paper, we extend the superresolution technique for different laser beam shaping. A complete set of superresolution diffractive elements is developed for the flat-top beam shaping, the single-circle beam shaping, and the novel circular Dammann grating. Five phase plates, corresponding to each of its applications, have been made by use of micro-optics technology. Experiments that are presented are in good agreement with the theoretical results. The superresolution technique presented in this paper should be highly interesting for the wide applications of laser beam shaping.
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