High-accuracy measurement of the optical transmittance of optical bulk materials at deep-ultraviolet wavelengths

摘要

A measurement setup that is capable of measuring the internal transmittance of fused-silica prisms at 193 nm with a precision better than 0.01%/cm (3σ) is presented. Its application to materials and wavelengths other than those that were chosen here for demonstration is straightforward. A lack of any standards makes it impossible to determine the absolute accuracy (also called measurement uncertainty) experimentally; however, calculations indicate that it is almost within the same margin as the precision.