Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing

摘要

Trichlorosilane disproportionation followed by dichlorosilane separation from the resulting mixture of silicon compounds in a regularly packed distillation column is considered. The dynamic and mass-transfer properties of the regular packing are studied theoretically and experimentally. Kinetic data are calculated for distillation in a column with a bottom reboiler operated in the discrete dichlorosilane drawoff mode. The calculated data are in satisfactory agreement with experimental data.