机译:在大面积多晶硅晶片上制造均匀黑色硅纳米结构的锯损伤的改进
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Hanwha SolarOne Nantong 200335 Jiangsu Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
North China Elect Power Univ Coll Environm Sci & Engn MOE Key Lab Resources & Environm Syst Optimizat Beijing 102206 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100029 Peoples R China|Univ Chinese Acad Sci Beijing 100029 Peoples R China;
Multi-crystalline black silicon; Saw damage layer; Solar cell; Diamond wire saw; Metal-assisted chemical etching; Additive;
机译:具有12英寸晶片水平的等离子体蚀刻制造的深层硅空腔的均匀性改善
机译:金刚石线锯多晶硅太阳能电池黑硅缺陷去除刻蚀的研究
机译:用于高效率大面积多晶硅太阳能电池的无损伤反应离子刻蚀
机译:多晶硅晶圆术术术术的优化优异的优异光电性能
机译:在硅上大面积,晶片级外延生长锗以及集成高性能晶体管。
机译:用低成本和大面积纳米光刻制造的锥形硅纳米结构的全向和宽带抗反射效果
机译:硅 - 碳化硅纳米粒子的生长和自组装成硅晶片表面的杂交蠕虫状纳米结构
机译:多晶硅晶片和太阳能电池中的氢和氘