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机译:动态原位光谱椭偏仪观察反应时间气态溅射TaO薄膜的初始阶段
King Mongkuts Inst Technol Ladkrabang, Fac Sci, Dept Phys, Bangkok 10520, Thailand;
King Mongkuts Inst Technol Ladkrabang, Fac Sci, Dept Phys, Bangkok 10520, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Nanotechnol Ctr, Pathum Thani 12120, Thailand;
Natl Sci & Technol Dev Agcy, Natl Met & Mat Technol Ctr, Pathum Thani 12120, Thailand;
King Mongkuts Inst Technol Ladkrabang, Fac Sci, Dept Phys, Bangkok 10520, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
King Mongkuts Inst Technol Ladkrabang, Coll Nanotechnol, Bangkok 10520, Thailand;
Synchrotron Light Res Inst, Maung 30000, Nakhon Ratchasi, Thailand;
Natl Sci & Technol Dev Agcy, Natl Elect & Comp Technol, Pathum Thani 12120, Thailand;
Tantalum oxide; Sputtering; Gas-timing; Dynamic iSE analysis; Spectroscopic ellipsometer; Film growth;
机译:通过动态在原位光谱型椭圆形测量通过动态观察反应性气体定时溅射TAO薄膜的初始阶段
机译:反应气定时射频磁控溅射制备非晶态氮氧化钽薄膜的光谱研究
机译:反应气定时射频磁控溅射制备非晶态氮氧化钽薄膜的光谱研究
机译:溅射沉积过程中膜生长初期铁磁薄膜的原位内应力观察
机译:原位光谱椭圆偏振法研究直流反应磁控溅射沉积的硅膜的结晶度和界面结构。
机译:反应和非反应溅射Zr-Al-N薄膜在退火过程中的结构和力学演变
机译:射频磁控溅射沉积HfO2薄膜的原位光谱椭偏和结构研究