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Design Considerations for Micro-Glassblown Atomic Vapor Cells

机译:微玻璃吹制原子蒸气细胞的设计注意事项

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摘要

This paper presents a design process for miniaturized atomic vapor cells using the micro-glassblowing process. It discusses multiple design considerations, including cell geometry, optical properties, materials, and surface coating. The geometry and the optical properties were studied using experimentally verified analytical and Finite Element Models (FEM). The cell construction material and surface coating were the focus of our experimental study on factors that affect the relaxation time (T2) of nuclear spins. We showed that the wafer-level coating process with Al2O3 increased the 131Xe T2 by $3imes $ and by switching from Borosilicate glass (Pyrex) to Aluminosilicate glass (ASG), T2 was improved by $2.5imes $ , for the same species. The improvement in the T2 is projected to reduce the ARW of an NMR gyro and the sensitivity of an NMR magnetometer by $3imes $ with Al2O3 coated cells and by $2.5imes $ with ASG cells. [2019-0158]
机译:本文介绍了使用微玻璃吹制工艺设计的微型原子蒸气电池的设计工艺。它讨论了多个设计注意事项,包括电池几何,光学特性,材料和表面涂层。使用经过实验验证的分析模型和有限元模型(FEM)研究了几何形状和光学特性。细胞构建材料和表面涂层是我们研究影响核自旋弛豫时间(T2)的因素的重点。我们表明,用Al2O3进行的晶圆级涂层工艺使131Xe T2的价格提高了3倍,并且通过从硼硅酸盐玻璃(Pyrex)切换到铝硅酸盐玻璃(ASG),对于相同的物种,T2的提高了2.5美元/倍。预计T2的改进将使NMR陀螺仪的ARW和NMR磁力计的灵敏度降低3倍,对于Al2O3涂层电池,对ASG电池,降低2.5倍。 [2019-0158]

著录项

  • 来源
    《Journal of Microelectromechanical Systems》 |2020年第1期|25-35|共11页
  • 作者

  • 作者单位

    Univ Calif Irvine Dept Elect Engn & Comp Sci Microsyst Lab Irvine CA 92697 USA|KACST Natl Ctr MEMS Technol Riyadh 12354 Saudi Arabia;

    Univ Calif Irvine Dept Mech & Aerosp Engn Microsyst Lab Irvine CA 92697 USA;

    Univ Calif Irvine Dept Mech & Aerosp Engn Irvine CA 92697 USA|Univ Calif Irvine Dept Elect Engn & Comp Sci Irvine CA 92697 USA|Univ Calif Irvine Dept Biomed Engn Microsyst Lab Irvine CA 92697 USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Glassblowing; atomic sensors; microfabrication; nuclear magnetic resonance (NMR); NMR gyroscopes; atomic cells; relaxation time;

    机译:吹玻璃;原子传感器微细加工;核磁共振(NMR);NMR陀螺仪;原子电池休息时间;

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