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首页> 外文期刊>Materials Chemistry and Physics >Effects Of Aluminum And Indium Incorporation On The Structural And Optical Properties Of Zno Thin Films Synthesized By Spray Pyrolysis Technique
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Effects Of Aluminum And Indium Incorporation On The Structural And Optical Properties Of Zno Thin Films Synthesized By Spray Pyrolysis Technique

机译:铝和铟掺入对喷雾热解技术合成Zno薄膜结构和光学性能的影响

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摘要

This paper reports the effects of Al and In content on the structural and optical properties of ZnO thin films synthesized by the spray pyrolysis technique. The concentration ratio of [Al]/[Zn] or [In]/[Zn] was kept at 1 at.%. Thickness of the films was in the range 315-320 nm. X-ray diffraction analysis indicates that the film doped with Al using aluminum chloride (AlCl_3·2H_2O) has a textured structure with (002) preferred orientation, but no texturisation is observed when doped with Al using aluminum nitrate (Al(NO_3 )_3 ·9H_2O) and also with In using indium nitrate (In(NO_3 )_3· 9H_2O). The surface morphology and grain size for the film doped with Al using aluminum chloride is slightly different from those of the films doped with Al and In using aluminum nitrate and indium nitrate, respectively. The grains of the film doped with Al using aluminum chloride were found to be well defined but those appeared to form clusters in the case of the other two films. From the optical study a slight shrinkage of band gap has been observed in the case of the film doped with In. Also, in the case of this film, width of the localized state in the band gap region was found to be higher compared to the other two films doped with Al. Thus, from all these studies it is evident that in the films prepared by spray pyrolysis the nature of dopant salt influences the grain structure, surface morphology and nucleation process which ultimately govern the structural and optical properties of the samples.
机译:本文报道了Al和In含量对喷雾热解法合成ZnO薄膜结构和光学性能的影响。 [Al] / [Zn]或[In] / [Zn]的浓度比保持在1at。%。膜的厚度在315-320nm的范围内。 X射线衍射分析表明,用氯化铝(AlCl_3·2H_2O)掺杂Al的膜具有择优取向(002)的织构结构,但用硝酸铝(Al(NO_3)_3·3· 9H_2O)以及使用硝酸铟的In(In(NO_3)_3·9H_2O)。用氯化铝掺杂Al的膜的表面形态和晶粒尺寸分别与用硝酸铝和硝酸铟掺杂Al和In的膜的表面形态和晶粒尺寸略有不同。发现使用氯化铝掺杂了Al的膜的晶粒被很好地定义,但是在其他两个膜的情况下,它们似乎形成了簇。从光学研究来看,在掺杂In的薄膜中,带隙略有收缩。另外,在该膜的情况下,发现带隙区域中的局部状态的宽度比掺杂Al的其他两膜高。因此,从所有这些研究中可以明显看出,在通过喷雾热解制备的膜中,掺杂盐的性质会影响晶粒结构,表面形态和成核过程,最终决定样品的结构和光学性质。

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