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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Development of microfocused x-ray source by using carbon nanotube field emitter
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Development of microfocused x-ray source by using carbon nanotube field emitter

机译:利用碳纳米管场发射器研制微聚焦X射线源

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摘要

To develop a microfocused x-ray source, field emission properties of a bundle of multiwalled carbon nanotubes were investigated under an ordinary vacuum pressure of 5 X 10~(-7) Torr for a practical use. Total emission current reached up to 1.3 mA at an applied voltage of -7 kV. An emitted electron beam was focused on a Cu anode by using a simple electrostatic lens and excited an x ray with the source size of less than 30 μm. X-ray transmission images were taken as a preliminary demonstration for a microfocused x-ray source and clear images whose resolutions were nearly equal to the source size of x ray were easily obtained.
机译:为了开发微聚焦x射线源,在实际真空度为5 X 10〜(-7)Torr的条件下,研究了一束多壁碳纳米管的场发射特性。在-7 kV的施加电压下,总发射电流达到1.3 mA。使用简单的静电透镜将发出的电子束聚焦在Cu阳极上,并以小于30μm的源尺寸激发x射线。 X射线透射图像被用作微聚焦X射线源的初步演示,并且很容易获得分辨率几乎等于X射线源大小的清晰图像。

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