Optical frequency comb profifometry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements

摘要

We demonstrated optical-frequency-comb profilornetry with a compressive sensing-based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2π-phase ambiguity. Profilometry with 10 × 10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of ～10 μm in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of ～3,9 × 10~5.