Influence of flowing parameter of magnetorheological polishing fluids (MRPFs) on the quality of processing polycrystalline glass ceramics

摘要

The study of rheological characteristics for two types of magnetorheological polishing fluids (MRPFs), MRPF-I based on cerium oxide abrasive particles and MRPF-2 based on nano-diamond abrasive particles, was carried out. Experiments on polishing of a polycrystalline sitall laser mirror substrates with these fluids using magnetorheological finishing process were executed. The surface structure of the samples after the polishing was investigated with the atomic force microscope. The results of surface measurements for the samples under the study polished with both MRPF-I and MRPF-2 fluids are reported in comparison with the existed data obtained from a regular pitch polishing method. The lowest root-mean-square roughness of 0.2-0.4 nm was obtained for the samples polished with MRPF-2.