Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology

摘要

A centro-symmetrical, monolithic three-dimensional fine-motion stage was investigated in terms of its static and dynamic characteristics. The outer frame with the size of a 100 mm cube includes differently sized, concentric X/Y/Z linear motion stages. The yaw, pitch and roll of each stage are reduced to less than 0.014 arcsec μm~-1 by adjusting the position of the axial load.