An acoustic micrometer and its application to layer thickness measurements

摘要

The principle and system of the acoustic micrometer are described. Its basic performance, with respect to the stability, accuracy, spatial resolution, and temperature dependence, is also discussed. Gold layers electroplated on substrates of 42% Ni-Fe alloy were taken as test specimens in the present study. The measurable range of the thickness for gold layers covered from 1 to 20 mu m when a frequency range of 10-200 MHz was used. Stability and accuracy were achieved to within +or-0.2% and +or-1%, respectively.