Development of circuit for measuring both Q variation and resonant frequency shift of quartz crystal microbalance

摘要

Although frequency shift is often used for QCM (Quartz Crystal Microbalance) measurement, Q of a resonator also varies when viscous loading occurs. However, it is difficult to measure Q variation in real time in comparison with resonant frequency shift. Furthermore, oscillation frequency shift deviates from real resonant one in case of large viscous loading. Here, the authors have developed the circuit based upon motional admittance method for measuring both Q variation and real resonant frequency shift. It was applied to a quartz resonator gas sensor, and its Q variation was measured by this circuit. Moreover, it was compared with a conventional oscillation circuit and the frequency shift of the former was remarkably different from that of the latter in case of large Q variation. When a quartz resonator coated with PEG20M (PolyEthylene Glycol 20M) membrane was exposed to water vapor, its Q decreased from 38700 to 3650 and a frequency shift of the oscillation circuit was only about one sixth of this circuit.