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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >The design of SAW RAC's using arrays of thin metal dots
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The design of SAW RAC's using arrays of thin metal dots

机译:使用薄金属点阵列设计SAW RAC

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摘要

Many successful dot array SAW devices including RAC's, resonators and band-pass filters have been reported, but the wide range of dot parameters, including dot dimensions, spacing and pattern, which allows flexibility in design, has not previously been utilized. This paper reports on the design of an RAC (reflecting array compressor) with a TB product of 1000, the emphasis being to exploit some of this flexibility. The design has been implemented using YZ LiNbO/sub 3/ with thin metal dots as the reflectors. It makes use of the wide range of reflectivities available from electrical effects in a novel weighting scheme based on dot size. The dots have been designed so that the sensitivity to over-etch is minimal. The array, which is sparse and near-periodic, has been designed to reduce unwanted reflections. This is least successful in the case of SAW to bulk wave reflection and the consequent loss due to this cause is accounted for in the design. The design approach is quite general and should be of use for other devices.
机译:已经报道了许多成功的点阵SAW器件,包括RAC,谐振器和带通滤波器,但是以前从未利用过宽范围的点参数,包括点尺寸,间距和图案,这使得设计具有灵活性。本文报告了TB产品为1000的RAC(反射阵列压缩机)的设计,重点是利用这种灵活性。该设计已使用带有细金属点的YZ LiNbO / sub 3 /来实现。它在基于点大小的新型加权方案中利用了从电效应中可获得的广泛反射率。点的设计使得对过度蚀刻的敏感性最小。稀疏且接近周期的阵列旨在减少不必要的反射。在声表面波对体波反射的情况下,这种方法最不成功,并且在设计中考虑了由于该原因而造成的后续损失。设计方法非常通用,应该用于其他设备。

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