Gas thermal conductivity sensor based on SAW

摘要

An uncoated surface acoustic wave (SAW) delay line integrated withna suitable film heater is used as a gas sensitive element based onnthermal conductivity change. It detects concentrations from 0.1-100% ofnH2, O2, He, and Ar in N2 in thentemperature range from 20-150°C. The value and sign of the SAW gasnresponse are controlled by substrate material and reference gas