A micromachined poly(vinylidene fluoride-trifluoroethylene)transducer for pulse-echo ultrasound applications

摘要

A process for manufacturing epoxy-backed integratednpoly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] transducersnusing standard microfabrication techniques is reported. The P(VDF-TrFE)nis spin-cast over a silicon membrane, which is backfilled with epoxy tonyield a wide-band, half-wavelength (Λ/2)-resonant device suitablenfor pulse-echo use. The main advantages of the fabrication process arenthe ability to build several devices at a time on a single wafer and thenpotential for integrating electronics on the same substrate with thentransducer. Twelve 31-MHz 2-mm diameter transducers were fabricated on an2-in diameter silicon wafer. A pulse length of about 100 ns was achievednwith a sample device, which exhibited a dynamic range of 40 dB and anninsertion loss of 48 dB. The axial resolution of the transducer innhealthy vascular tissue was estimated to be 79 Μm