Ultrasonic thin-walled tube wave structure for sensing devices

摘要

Theoretical and experimental investigations of thin-walled tubenacoustic wave devices for gravimetric sensing applications arenpresented. Integrated sensor configurations have been demonstrated bynemploying a sol-gel processed thin piezoelectric lead zirconate titanaten(PZT) film. This was coated coaxially on stainless steel tubes andninterdigital transducers (IDT) fabricated as the transmitter andnreceiver on the curved tube surfaces. We have observed tube waves alongnboth the axial and circumferential directions between 1 and 6.6 MHz. Wenhave also analyzed the mass sensitivities of different modes propagatingnalong the tubes and shown that high mass sensitivity can be achieved bynkeeping the tube wall thin