Elastic surface wave devices based on piezoelectric thick-films

摘要

A study has been performed for the development of elastic-wavesnstructures, involving screen printed and fired piezoelectric layers onnnonpiezoelectric substrates, intended for new families of thick filmnsensors. This study approached the electroacoustic effects, i.e., thencoupling between electromechanical parameters of the layers and elasticnproperties of the substrate, related to the wave propagation. In thisnwork, particular attention is devoted to devices implemented on aluminansubstrates where SAW as well as (symmetric and antisymmetric) Lamb'snwaves are generated. The realization processes and the performancencharacteristics of these structures are presented