Design and test of 3 GHz, fundamental mode surface transverse waveresonators on quartz

摘要

Surface transverse wave (STW) resonators, based on the propagationnof high velocity shear horizontal waves on Y-rotated quartz werendesigned, fabricated and tested. A model is presented to predict thenresonant frequency of a 3-grating structure as a function of designnparameters such as periodicities, metal thickness, and finger-to-gapnratio. Experimental devices have been fabricated by direct e-beamnlithography with linewidth geometries in the range of 0.3-0.5 Μm, andnan operating frequency close to 3 GHz in fundamental mode. Two differentndesigns using either a quasi synchronous structure (type 1) or a changenof periodicity inside the cavity (type 2) were tested. The bestnexperimental factor of merit is close to the best results alreadynpublished for quartz STW resonators