Mass sensitivity of acoustic plate mode in liquids

摘要

In this paper, the concept of electrical effective permittivitynfunction is used to calculate the eigen-frequencies and the particlendisplacements of piezoelectric acoustic plate modes (APM). These resultsnallowed us to determine the mass sensitivities of the first ordernvibration modes using a first order perturbation theory. Theoreticalnresults are discussed and compared to those of a variational method andnisotropic two-layer composite analysis in the case of a shear horizontalnAPM sensor on a singly rotated cut quartz substrate. Experimentalnmeasurements by a copper electrodeposition are carried out and show thatnthe perturbation method leads to a better understanding of the APMnbehavior