Standing wave bi-directional linearly moving ultrasonic motor

摘要

A standing wave bi-directional linearly moving ultrasonic motornhas been studied for the purpose of implementing a practical linearnultrasonic motor with simple structure, simple driving and highnresolution. The fundamental principle of this linear motor isnprojections on the right sides of a standing wave crests generatingnthrust force right-diagonally on the slider pressed against thenprojections. Correspondingly, projections on the left sides of the wavencrests make the slider move toward the left. In order to realizenbi-directional actuating, vibration mode B3 or B4 is excited in anrectangular plate-type vibrator to make the projections on the rightnsides or the left sides of the wave crests. In this paper, the operationnprinciple of the linear motor is demonstrated. Furthermore, a prototypenlinear ultrasonic motor of 40 mm in length, 10 mm in width is fabricatednand investigated. The following performances have been achieved: maximumnspeed 200 mm/s, maximum force output 150 gf, and resolution less thann0.1 Μm