Analysis and optimization of Love wave liquid sensors

摘要

Love wave sensors are highly sensitive microacoustic devices, which are well suited for liquid sensing applications thanks to the shear polarization of the wave. The sensing mechanism thereby relies on the mechanical (or acoustic) interaction of the device with the liquid. The successful utilization of Love wave devices for this purpose requires proper shielding to avoid unwanted electric interaction of the liquid with the wave and the transducers. In this work we describe the effects of this electric interaction and the proper design of a shield to prevent it. We present analysis methods, which illustrate the impact of the interaction and which help to obtain an optimized design of the proposed shield. We also present experimental results for devices that have been fabricated according to these design rules.