We present a new type of surface acoustic wave device for sensor applications where the need for bonding wires is eliminated. Instead the device is coupled inductively to the RF circuitry. The impedance of such devices and the necessary matching have been investigated both theoretically and experimentally. The devices have repeatedly been operated at temperatures up to 400/spl deg/C and have shown a good temperature resistance. In order to test the suitability of the new concept for sensor applications, several devices with an operating frequency of 363 MHz were coated with copper phthalocyanine for the detection of NO/sub 2/. From these measurements we derive a detection limit of these devices below 1 ppb for NO/sub 2/.
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机译:我们为传感器应用提供了一种新型的表面声波装置,其中消除了对键合线的需求。取而代之,该设备感应耦合至RF电路。在理论上和实验上已经研究了这种设备的阻抗和必要的匹配。该设备已在高达400 / spl deg / C的温度下反复运行,并显示出良好的耐热性。为了测试新概念对传感器应用的适用性,在工作频率为363 MHz的一些设备上涂了铜酞菁,以检测NO / sub 2 /。从这些测量中,我们得出这些设备的NO / sub 2 /的检出限低于1 ppb。
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