Using FEA to treat piezoelectric low-frequency resonators

摘要

In developing small micromachined components, it is difficult andncostly to rely only on experiments. Nevertheless, a detailednunderstanding of their functioning, also on a system level, is essentialnif their numerous device possibilities are to be used to their fullestnextent. Development efforts can be focused on the device if performancenpredictions can be made with available computer software. This papernaddresses the use of available finite element analysis (FEA) programs. Ancomparison of simulation and analytic results shows that FEA can be usednto accurately predict properties such as static and harmonic response,nfrequency-dependent impedance, and piezo-induced changes in resonancenfrequencies. A limitation is the need for CPU-power, especially whenndetermining high overtones. Also, piezoelectric materials with a finitenresistivity are more complicated to handle