Theory for shear horizontal surface acoustic waves in finite synchronous resonators

摘要

An analytic approach is developed for simulating synchronous resonators employing shear horizontally polarized surface acoustic waves, such as surface transverse waves, and leaky surface acoustic waves on LiTaO3 and LiNbO3 substrates. The approach, based on a simplified parametrized Green's function theory, allows the description of the localization of the wave and the interaction with bulk acoustic waves. An analytic expression is found for the harmonic admittance of an infinite periodic electrode array, and approximate corrections for finite structures are presented. The model enables fast computation of the admittance of synchronous resonators, and it compares favorably with experiments and numerical simulations.