Micromachining of quartz plates: determination of a database bycombined stereographic analysis and 3-D simulation of etchingshapes

摘要

Simple microstructures such as mesa and membrane are micromachinednon singly and doubly rotated quartz plates. A stereographic analysis ofn3-D etching shapes is used to recognize rhombohedral faces limitingnmicromachined structures. An iterative procedure is used to adjust thendatabase in which first we generate extrema in the dissolution slownessnfor these faces, and second, we compare step-by-step theoretical 3-Dnetching shapes with experimental structures. Theoretical shapes fornmicrostructures are found to be in satisfactory agreement withnexperiments