Piezoelectric micromotor using a metal-ceramic composite structure

摘要

This paper presents a new piezoelectric micromotor design, innwhich a uniformly electroded piezoelectric ring bonded to a metal ringnis used as the stator. Four inward arms at the inner circumference ofnthe metal ring transfer radial displacements into tangentialndisplacements. The rotor ends in a truncated cone shape and touches thentips of the arms. A rotation takes place by exciting coupled modes ofnthe stator element, such as a radial mode and a second bending mode ofnthe arms. The behavior of the free stator was analyzed using the ATILAnfinite element software. Torque vs. speed relationship was measured fromnthe transient speed change with a motor load. A starting torque of 17nΜNm was obtained at 20 Vrms. The main features of this motor are lowncost and easy assembly because of a simple structure and small number ofncomponents