A new triply rotated quartz cut for the fabrication of low loss IF SAW filters

摘要

Analysis of the quartz properties shows the existence of unexplored angular domains for which Rayleigh waves can be efficiently excited, exhibiting physical characteristics better than the ones of the (ST,X) cut. This paper presents a family of quartz cuts allowing significant improvements of surface acoustic wave (SAW) devices on quartz. A first set of experiments has been performed, confirming the theoretical predictions of the basic properties of SAW on these cuts. A second set of measurements then was achieved to refine the identification of coefficients needed to perform industrial SAW design. A demonstration of the improvements accessible using this new cut is presented. A low loss SAW filter working at 71 MHz has been fabricated using smaller aluminum thickness than that for standard quartz cuts, and exhibiting all the properties required for its industrial implementation.