Q values of longitudinal leaky SAWs propagating on rotated Y-cut LN substrates along the perpendicular to the X axis

摘要

Longitudinal leaky SAWs (LLSAWs), which can be excited in a thick aluminum (Al) grating on a rotated Y-cut lithium-niobate substrate, were analyzed in a simulation that combined both FEM and BEM. The Q-value dependence of an LLSAW on the rotated angle and the Al-grating thickness was clear. The simulation results were confirmed experimentally. These SAWs have potential applications in high-frequency SAW devices because their velocities range from 6100 to 6500 m/s and their optimum Q values are theoretically larger than 4000.