Prediction of the thermal sensitivity of surface acoustic waves excited under a periodic grating of electrodes

摘要

The prediction of the temperature sensitivity of surface acoustic wave (SAW) devices still requires improvement because the nature of the implemented surface modes and the devices' complexity strongly change from the early basic Rayleigh-wave-based devices. To address this problem, a theoretical analysis and a numerical tool have been developed to predict the thermal dispersion of general electro-acoustic devices. The proposed model accounts for the electrode contribution to the frequency-temperature law. The computed thermal sensitivities are compared to experimental results for different kinds of substrates and waves.