Coupled tangential-axial resonant modes of piezoelectric hollow cylinders and their application in ultrasonic motors

摘要

This paper describes a tangential-axial eigen-mode of a piezoelectric hollow cylinder. A new type of piezoelectric ultrasonic motor using this oscillation mode has been developed. The motor is a traveling-wave-type motor. The stator of such a motor consists of a solid piezoelectric hollow cylinder, which, excited in the tangential-axial resonant mode by a three-phase electrical signal, exhibits elliptical displacement and transfer rotation to the rotor. The behavior of the stator has been simulated with finite element method (FEM) software. The simulation results have been checked with single-point contact measurements on the surface of the ultrasonic motors. The paper closes with the introduction of new ultrasonic motors based on this oscillation mode.