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Potential of acoustic imaging in the detection of nanometer gaps

机译:声学成像在检测纳米间隙中的潜力

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摘要

The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap
机译:研究了水浸和干接触声成像技术检测嵌入在硅中的纳米间隙的潜力。用于检测高度超过10 nm的间隙的灵敏度仅取决于成像的横向分辨率,并且与间隙的高度无关

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