Thickness Dependence of Electrical Properties of PZT Films Deposited on Metal Substrates by Laser-Assisted Aerosol Deposition

Baba S.; Tsuda H.; Akedo J.

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Thickness Dependence of Electrical Properties of PZT Films Deposited on Metal Substrates by Laser-Assisted Aerosol Deposition

机译：激光辅助气溶胶沉积在金属基底上沉积的PZT膜的电性能的厚度依赖性

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Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a

机译：研究了直接沉积在执行器装置中不锈钢（SUS）衬底上的锆钛酸铅（PZT）厚膜的电学性质（介电，铁电和压电性质）对膜厚的依赖性。

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《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 |2008年第5期|p.1009-1016|共8页
作者
Baba S.; Tsuda H.; Akedo J.;
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中图分类声学工程;计量学;
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Thickness Dependence of Electrical Properties of PZT Films Deposited on Metal Substrates by Laser-Assisted Aerosol Deposition

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