Properties of Shear Horizontal Acoustic Plate Modes in BT-Cut Quartz

摘要

Properties of shear horizontal acoustic plate modes (SHAPMs) in BT-cut quartz were calculated and measured. A delay line with a long interdigital transducer, deposited on ??50.5u000b0;YX90u000b0;-oriented quartz plate, was used for the measurements. For one of the SHAPMs, at a frequency of about 100.4 MHz, insertion loss, turnover temperature, and quadratic temperature coefficient of frequency of about 10 dB, 15u000b0;C, and ??30 ppb/(u000b0;C)2 in air, respectively, were obtained. Using water and glycerin solutions, insertion loss changes against dynamic viscosity were measured for this mode. In a viscosity range from about 1 mPa??s to 1000 mPa??s, an insertion loss change of about 14 dB was obtained.