Characteristics of surface acoustic waves excited by (1120) zno films deposited on R-sapphire substrates

摘要

(1120)-textured ZnO films are deposited on Rsapphire substrate by RF magnetron sputtering and the effects of deposition conditions on ZnO films are investigated. The chemical compositions of the ZnO films are characterized by X-ray photoelectron spectroscopy and the results indicate that the ratio of latticed oxygen to zinc increases with increasing of oxygen concentration in the sputtering gas, which demonstrates the improvement of crystal structures in ZnO films. To investigate the characteristics of surface acoustic waves excited by the (1120)-textured ZnO films, SAW delay lines based on layered structures of (1120) ZnO film/R-sapphire substrate are fabricated, in which Rayleigh and Love modes are excited along the (0001)- and (1100)-directions of the ZnO films, respectively. The phase velocities and electromechanical coupling factors of both wave modes are characterized as functions of the film-thickness??to??wavelength ratio. The acoustic properties of the layered structures are calculated using the transfer matrix method. The experimental and theoretical results are in good agreement with each other.