PMN-PT single-crystal high-frequency kerfless phased array

摘要

This paper reports the design, fabrication, and characterization of a miniature high-frequency kerfless phased array prepared from a PMN-PT single crystal for forwardlooking intravascular or endoscopic imaging applications. After lapping down to around 40 ;C;m, the PMN-PT material was utilized to fabricate 32-element kerfless phased arrays using micromachining techniques. The aperture size of the active area was only 1.0 ?? 1.0 mm. The measured results showed that the array had a center frequency of 40 MHz, a bandwidth of 34% at -6 dB with a polymer matching layer, and an insertion loss of 20 dB at the center frequency. Phantom images were acquired and compared with simulated images. The results suggest that the feasibility of developing a phased array mounted at the tip of a forward-looking intravascular catheter or endoscope. The fabricated array exhibits much higher sensitivity than PZT ceramic-based arrays and demonstrates that PMN-PT is well suited for this application.