Optical and electrical characterization of defects in zinc oxide thin films grown by atomic layer deposition

Bartlomiej Witkowski; Elzbieta Guziewicz; Grazia Tallarida; Grzegorz Luka; Lukasz Wachnicki; Marek Godlewski; Nolwenn Huby; Rafal Jakiela; Tomasz A. Krajewski

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Optical and electrical characterization of defects in zinc oxide thin films grown by atomic layer deposition

机译：通过原子层沉积法生长的氧化锌薄膜中缺陷的光电特性

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《Optica applicata》 |2009年第4期|共页
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Bartlomiej Witkowski; Elzbieta Guziewicz; Grazia Tallarida; Grzegorz Luka; Lukasz Wachnicki; Marek Godlewski; Nolwenn Huby; Rafal Jakiela; Tomasz A. Krajewski;
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中图分类光学;
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1. Optical and electrical characterization of defects in zinc oxide thin films grown by atomic layer deposition [J] . TOMASZ A. KRAJEWSKI, GRZEGORZ LUKA, LUKASZ WACHNICKI, Optica applicata . 2009,第4期

机译：通过原子层沉积法生长的氧化锌薄膜中缺陷的光电特性
2. Effects of in-situ molecular oxygen exposure on the modulation of electrical properties of zinc oxide thin films grown by atomic layer deposition [J] . Hui Kyung Park, Bong Seob Yang, Myung Sang Kim, Physica status solidi . 2015,第2期

机译：原位分子氧暴露对原子层沉积生长氧化锌薄膜电学性能的影响
3. Effect of zincone ratio on mechanical reliability of aluminum-doped zinc oxide-zincone multilayer thin films grown on flexible substrate using atomic/molecular layer deposition hybrid techniques [J] . Song Seung Hak, Hwang Sung-Tae, Choi Byoung-Ho Thin Solid Films . 2020,第Jul31期

机译：使用原子/分子层沉积杂交技术在柔性基板上生长掺杂氧化锌氧化锌 - 锌 - 锌氧化锌多层薄膜机械可靠性的影响
4. On the Characteristics of Zinc Oxide Films Grown on (11-20) Sapphire Substrates by Atomic Layer Deposition Using Diethylzinc and Nitrous Oxide [C] . Kuo-Yi Yen, Kuang-Pi Liu, Yen-Ting Lin, International symposium on silicon nitride, silicon dioxide, and emerging dielectrics;Meeting of the Electrochemical Society . 2009

机译：二乙基锌和一氧化二氮原子层沉积在（11-20）蓝宝石衬底上生长的氧化锌膜的特性
5. Manipulation of electrical resistivity and optical properties of zinc oxide thin films grown by pulsed laser deposition and the sol-gel method. [D] . Crisp, Ryan W. 2012

机译：通过脉冲激光沉积和溶胶-凝胶法控制氧化锌薄膜的电阻率和光学性质。
6. Effects of Rapid Thermal Annealing on the Structural Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition [O] . Jingjin Wu, Yinchao Zhao, Ce Zhou Zhao, 2016

机译：快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构电学和光学性质的影响
7. Effects of Rapid Thermal Annealing on the Structural, Electrical, and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition [O] . Wu, J, Zhao, Y, Zhao, C, 2016

机译：快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构，电学和光学性质的影响
8. X-ray Diffraction and Ellipsometric Studies of Zinc Sulfide Thin Films Grown by Atomic Layer Epitaxy [R] . Oikkonen, M. 1988

机译：原子层外延生长硫化锌薄膜的X射线衍射和椭偏研究

Optical and electrical characterization of defects in zinc oxide thin films grown by atomic layer deposition

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