Reflectivity Modelling of All-Porous-Silicon Distributed Bragg Reflectors and Fabry-Perot Microcavities

摘要

Herein, the problem of nanocrystaline silicon laser and its importancein microelectronics are discussed upon. The features of vertical Fabry-Perotmicrocavities made on the base of porous silicon are described. The responsesof the re.ectivity of the distributed re.ection Bragg mirrors and Fabry-Perotmicrocavities were found using transfer matrixes method for this purpose.Inherent optical parameters of porous silicon, deposited by electrochemical etch,were used in the calculations. The calculation of the re.ectivity of the distributedre.ection Bragg mirrors with front active layer of nanostructural porous siliconhad been examined. In the second part, the features of Fabry-Perot microcavitieson variation of the number of layers of the front or rear mirrors are described.The impact of the thickness of the active nanocrystaline silicon spacer betweentwo distributed re.ection Bragg mirrors upon the spectra of optical re.ectivityof Fabry-Perot microcavities in the wavelength range of 0.4–0.9 μm had beenexamined as well. The made conclusions are important for improvement of thethickness of the active porous silicon spacer in front of Bragg mirror and thefeatures of Fabry-Perot microcavities