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The Comparison of Environmental Effects on Michelson and Fabry-Perot Interferometers Utilized for the Displacement Measurement

机译:迈克尔逊和法布里-珀罗干涉仪用于位移测量的环境影响比较

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摘要

The optical structure of general commercial interferometers, e.g., the Michelson interferometers, is based on a non-common optical path. Such interferometers suffer from environmental effects because of the different phase changes induced in different optical paths and consequently the measurement precision will be significantly influenced by tiny variations of the environmental conditions. Fabry-Perot interferometers, which feature common optical paths, are insensitive to environmental disturbances. That would be advantageous for precision displacement measurements under ordinary environmental conditions. To verify and analyze this influence, displacement measurements with the two types of interferometers, i.e., a self-fabricated Fabry-Perot interferometer and a commercial Michelson interferometer, have been performed and compared under various environmental disturbance scenarios. Under several test conditions, the self-fabricated Fabry-Perot interferometer was obviously less sensitive to environmental disturbances than a commercial Michelson interferometer. Experimental results have shown that induced errors from environmental disturbances in a Fabry-Perot interferometer are one fifth of those in a Michelson interferometer. This has proved that an interferometer with the common optical path structure will be much more independent of environmental disturbances than those with a non-common optical path structure. It would be beneficial for the solution of interferometers utilized for precision displacement measurements in ordinary measurement environments.
机译:普通的商业干涉仪,例如迈克尔逊干涉仪,的光学结构是基于非公共的光路。这种干涉仪由于在不同的光路中引起的不同的相位变化而受到环境的影响,因此,测量精度将受到环境条件的微小变化的显着影响。 Fabry-Perot干涉仪具有常见的光路,对环境干扰不敏感。这对于在普通环境条件下进行精确位移测量将是有利的。为了验证和分析这种影响,已经进行了两种类型的干涉仪的位移测量,即,自制的法布里-珀罗干涉仪和商业的迈克尔逊干涉仪,并在各种环境干扰情况下进行了比较。在几种测试条件下,自制的Fabry-Perot干涉仪对环境干扰的敏感度明显低于商用迈克尔逊干涉仪。实验结果表明,法布里-珀罗(Fabry-Perot)干涉仪中的环境干扰引起的误差是迈克尔逊干涉仪中误差的五分之一。这证明了具有共同光路结构的干涉仪将比具有非共同光路结构的干涉仪更不受环境干扰的影响。对于在普通测量环境中用于精密位移测量的干涉仪的解决方案将是有益的。

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