Liquid-level Measurement with Fiber-optic Low Coherence Interferometer: Micrometer-resolution Approach

摘要

According to the fact that the surface of liquid with low viscosity coefficient is a good reflection plane for a broadband light beam, liquid-level measurement in micrometer resolution is designed based on a fiber-optic low coherence interferometer in Michelson configuration. The wave front of the reflected light beam is well enough to form an interferogram with a beam reflected from an optic mirror mounted on a stepping scanning-motor. The central peak of the interferogram is read as a measure of the liquid level. Experimental results show that this noncontact method can reach a resolution of ±1.25 μm in the measurement range of 86 mm.