Research on Reaction-bonded SiC for Optical Application

摘要

Ultrasonic treatment technology is utilized to fabricate RBSiC, and a new polishing technology-float polishing is developed to process RBSiC. SEM, XRD, AFM. Raman scattering and WYCO are applied to measure and analyze the RBSiC and the polished surface. The results indicate that the ultrasonic treatment decreases the content of the free Si and makes RBSiC denser and more uniformity. The float polishing technology is suitable for polishing RBSiC effectively.