基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究

摘要

An inertia-friction based 4 D.O.F microactuator driven by PZT is presented. The 4 D.O.F microactuator prototype made based on an experiment and its kinematic characteristics are discussed. The experiment proves that it is feasible to apply the driving principle to the microactuator. The microactuator is linear and controllable at the frequency between 0 to 3000 Hz of voltage. The existing design problems and the future research on the microactuator are discussed as well.%提出了一种由PZT驱动、基于惯性-摩擦原理的四自由度驱动器方案,在原理实验的基础上制作了四自由度驱动器的原型,并讨论了这一微驱动器的运动特点。实验证明:这一原理应用于微驱动器是可行的。压电陶瓷的通电频率处于0Hz～30000Hz时微驱动器的运动是线性可控的。同时,也讨论了驱动器设计中应该注意的问题及其未来的研究方向。