散射法表面粗糙度测量

摘要

The paper describes scalar- and vector-scattering theories.Using a soft X-ray reflectometer, the super-smooth surface has been measured by scattering method, and the roughness of super-smooth surface has been calculated by means of scalar- and vector scattering theories. The calculating results are in accordance with those measured by WYKO.%介绍了标量和矢量两种散射理论，并用软X射线反射率计对超光滑表面进行散射测量，同时应用这两种理论计算了超光滑表面粗糙度均方根值，从计算结果来看，两种理论所得结果与WYKO测量结果吻合较好。