用反向法测轴系回转误差

摘要

In addition to describing a course of testing rotating error of high-precision axis with reversal method,the paper also introduces all kinds of testing methods, especially the testing process of the rotating error of axis in manufacturing laser direct writing of binary optics elements. The rotating error of the axis measured is 0.018μm. This paper gives the testing theory, the way to separate the error and the practical applications in detail. Several factors that affect the reduplication of consequence are summarized. Finally, the authors conclude that the method is not only simple and practical, but also very accurate, being suitable for mechanists.%阐述了用反向法对高精度轴系回转误差测试的过程及测试的一些结果。对轴系各种测试方法作了简单介绍，重点介绍了“二元光学元件激光直接写入设备”轴系回转误差的测试过程。测得轴系的回转误差为0.018μm。对反向法测试原理、误差分离的数学方法及实际应用，进行了描述。总结了影响测量结果重复性的几个因素。测试结果证明，此方法简单实用、结果准确，适合于精密机械设计人员使用。