R&D Center for Optical Thin Film Coating Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;
R&D Center for Optical Thin Film Coating Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;
high power laser coating; laser induced damage threshold (LIDT); defect; thickness uniformity; oxygen-plasma post-treatment; large aperture; surface deformation;