MEMS工艺模拟与有限元软件接口的实现

摘要

The process simulation for Micro-electric-mechanic Systems(MEMS) can be used in predicting the actual structure of a MEMS before processing,which contributes to understand processing properties,shorten design periods and to reduce production costs. Because the current simulation software for MEMS analysis can not be combined with a finite element software,this paper presents a interface named as ANDYD Parametric Design Language(APDL) to link the process simulation software and the finite element software. By proposed APDL,the results from MEMS process simulation are imported into the finite element software to establish a model,then it is used to analyze on mechanical,electrical and thermal parameters. Moreover,the largest circle algorithm is introduced the software to implement the model reconstruction for the process simulation in the finite element software after analysis on several kinds of boundary contour extraction methods,which completes an seamless linking from the process simulation to the finite element analysis(FEA). Experimental results prove that proposed interface design is conductive to the systematization of MEMS CAD technologies.%微机电系统工艺模拟可在实际加工前预测MEMS器件的实际结构,有利于理解工艺机理,缩短设计周期,减少生产费用.针对目前用于MSMS器件分析的模拟软件尚不能很好地与有限元软件对接的问题,设计了工艺模拟软件与有限元分析软件的接口.通过这个接口,将MEMS工艺模拟所得到的数据经过数据格式的转换导入有限元分析软件(ANSYS)中并建模,使之可以进行诸如机械、热、电等物理参量的分析.在分析了目前关于(曲线)边界轮廓提取的各种方法后,引进了最大圈算法,解决了工艺模拟结果在有限元软件中的模型重构问题,实现了从工艺模拟到有限元分析的无缝对接.提出的接口设计对实现MEMS CAD体系化具有重要的促进作用.