“Isara400”超精密坐标测量机的设计与标定

摘要

介绍了Isara 400 3维超精坐标测量机标定的关键技术,包括平台标定和系统镜面台非垂直度标定.同时,提出了一种新的超精接触探针系统,给出了这种3维灵敏度探针的标定结果.%This paper presents critical aspects of the calibration of the Isara 400 ultra-precision 3D Coordinat Measuring Machine(CMM),such as the calibration of flatness and out-of-squareness of the system's mirror table.In addition,a newly developed ultra-precision tactile probe system is described and the results of the 3D sensitivity calibration of this probe are presented.